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X Series Semi-Automatic Probe Station
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The X series is a semi-automatic wafer probe station for 6, 8 and 12 inch Si, GaN and SiC devices. It covers DC I-V and C-V, optical, RF and 1/f noise, and it can be fitted later for high-power wafer test, RF, a full-automatic loader and a temperature chuck.
The chuck moves at 70 mm/s or faster, with motion accuracy of 1 µm or better and an index time of 500 ms or less. A shielded chamber keeps leakage low, and the station can be opened so the whole chuck pulls out 370 mm for loading.
Key Features
- Semi-automatic, and it can still be driven by hand
- Automatic wafer alignment, mapping, die-size measurement and remote test data
- One-button RF probe calibration and four-axis chuck calibration
- Temperature stability better than ±0.08 °C
- Microscope with simultaneous 100X to 1000X views
- High-power, RF and fully automatic test are field upgrades, not separate models
Specifications
| Specification | X6 | X8 | X12 |
|---|---|---|---|
| Wafer | 6 inch | 8 inch | 12 inch |
| Control | Semi-automatic | Semi-automatic | Semi-automatic |
| Chuck speed | ≥70 mm/s | ≥70 mm/s | ≥70 mm/s |
| Motion accuracy | ≤1 µm | ≤1 µm | ≤1 µm |
| Index time | ≤500 ms | ≤500 ms | ≤500 ms |
| Temperature stability | Better than ±0.08 °C | Better than ±0.08 °C | Better than ±0.08 °C |
| Optics | 100X–1000X | 100X–1000X | 100X–1000X |
| Power | 220 V, 50–60 Hz | 220 V, 50–60 Hz | 220 V, 50–60 Hz |
The current product page publishes one outline for the series, 1060 × 1610 × 1550 mm, and a weight of about 1500 kg. It does not publish a separate size for each wafer.
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
