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4200A-SCS Parameter Analyzer
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The 4200A-SCS Parameter Analyzer is a customizable, fully integrated semiconductor parameter analyzer that provides synchronized current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V characterization for semiconductor device, materials and process development, reliability and failure analysis.
Key Features
- Fully integrated, customizable parameter analyzer for synchronized I-V, C-V and ultra-fast pulsed I-V characterization
- Up to nine SMUs: 4200-SMU / 4201-SMU (±210 V / 100 mA) and 4210-SMU / 4211-SMU (±210 V / 1 A)
- 10 aA current measurement resolution with optional 4200-PA preamplifier
- 4215-CVU / 4210-CVU C-V units: 1 kHz to 10 MHz, ±210 V DC bias with SMUs, femtofarad capability
- 4225-PMU ultra-fast pulsed I-V: ±40 V (80 Vp-p), ±800 mA, 200 MS/s (5 ns) simultaneous I and V
- 4220-PGU high-voltage pulse generator: ±40 V (80 Vp-p)
- 4200A-CVIV multi-switch for switching between I-V and C-V without re-cabling
- Clarius GUI software with hundreds of ready-to-use application tests
- Fully upgradable: add instruments now or later
Instrument Modules
| Module | Type | Key Specification |
|---|---|---|
| 4200-SMU / 4201-SMU | Medium power SMU | ±210 V, ±105 mA |
| 4210-SMU / 4211-SMU | High power SMU | ±210 V, ±1.05 A |
| 4200-PA | Preamplifier | 10 aA / 0.2 µV resolution |
| 4215-CVU / 4210-CVU | Capacitance-voltage unit | 1 kHz – 10 MHz, ±210 V DC bias with SMUs |
| 4225-PMU + 4225-RPM | Ultra-fast pulse measure unit | ±40 V (80 Vp-p), ±800 mA, 200 MS/s |
| 4220-PGU | High voltage pulse generator | ±40 V (80 Vp-p) |
| 4200A-CVIV | I-V/C-V multi-switch | Switch between I-V and C-V without re-cabling |
Packages
| Model | Configuration |
|---|---|
| 4200A-SCS-PKA | High Resolution IV: 4200A-SCS mainframe, 2× 4201-SMU, 1× 4200-PA preamplifier, 8101-PIV test fixture |
| 4200A-SCS-PKB | High Resolution IV & CV: 4200A-SCS mainframe, 2× 4201-SMU, 1× 4200-PA, 1× 4215-CVU, 8101-PIV test fixture |
| 4200A-SCS-PKC | High Power IV & CV: 4200A-SCS mainframe, 2× 4201-SMU, 2× 4211-SMU, 2× 4200-PA, 1× 4215-CVU, 8101-PIV test fixture |
| 4200A-SCS Custom Configuration | 4200A-SCS mainframe configured with your choice of SMU, CVU, PMU, PGU and preamplifier modules |
Please contact us for a quotation and configuration.
