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Ultra-Clean Room Optical Table (Class 100)
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Optical tables designed for Class 100 clean rooms and semiconductor labs. The top, bottom and side plates are all 12Cr13 ferromagnetic stainless steel, the frameless design has all five working surfaces machined and polished to Ra < 1.6 µm, and there are no exposed welds on the supports, so every surface is easy to clean.
Polymer cleaning cups isolate the sealed internal cavity from the top so the table does not release dust under negative room pressure, and the all-stainless welded cross-grid core uses no adhesive that could out-gas. Each table is cleaned at high temperature and pressure before delivery. Three isolation types are available: high-precision air-floating self-balancing (DL-GJBQF1), independent airbag (DL-DLBQN) and rubber pad (DL-XJBPT).
Models & Specifications
| Specification | Value |
|---|---|
| Table Size L×W×T (mm) | 1500×1000×100 |
| Height (mm) | 800 |
| Flatness (mm/m²) | 0.1 |
| Max. Load (kg) | 800 |
| Max. Dynamic Deflection Coefficient | 1.1×10⁻³ ~ 3.5×10⁻³ |
| Max. Relative Displacement (nm) | 0.22~0.70 |
| Model | DL-GJBQF1-1510-10 | DL-DLBQN-1510-10 | DL-XJBPT-1510-10 |
|---|---|---|---|
| Natural Frequency | 1–1.7Hz | 2–3Hz | 5–7.5Hz |
| Vertical Natural Frequency | No load: 1-1.7Hz; full load: 0.8Hz | – | – |
| Horizontal Natural Frequency | No load: 1.1-1.7Hz; full load: 1.0Hz | – | – |
| Isolation Method | Air-floating isolation | Air-floating isolation | Rubber damping isolation |
| Inflation Pressure | Max. 0.6 MPa | Max. 0.6 MPa | – |
| Leveling Method | Air-floating self-leveling | Mechanical leveling | Mechanical leveling |
Custom sizes, hole patterns and isolation options are available on request. Datasheet: Dimension-Labs optical table selection guide (Chinese).
