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M Series Manual Probe Station
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The M series is a small manual station for teaching labs and for pads larger than 30 µm. It covers DC I-V and C-V, low current to 100 fA, 1/f noise, device characterisation, RF to 67 GHz and MEMS. Chucks are 4, 6 and 8 inch.
Key Features
- Enclosed chuck stage with a THK screw and no backlash
- Three vacuum rings, each switched on its own, plus a 1 mm centre hole
- Chuck rotation 360°, fine rotation 0.002° on the current feature list
- Up to six DC positioners, or four RF and two DC
- Stereo microscope 16X to 100X
- Coaxial leakage 1 pA/V, triaxial 100 fA/V, at 25 °C
Specifications
| Specification | M4 | M6 | M8 |
|---|---|---|---|
| Chuck | 4 inch | 6 inch | 8 inch |
| Size (L × W × H) | 650 × 490 × 620 mm | 650 × 490 × 620 mm | 766 × 500 × 651 mm |
| Weight | About 45 kg | About 52 kg | About 90 kg |
| Power | 220 V AC, 50–60 Hz | 220 V AC, 50–60 Hz | 220 V AC, 50–60 Hz |
| Chuck XY travel | 100 × 100 mm | 150 × 150 mm | 200 × 200 mm |
| Chuck accuracy | 10 µm | 10 µm | 10 µm |
| Theta | +45° coarse, ±8° fine at 0.01° | Same | Same |
| Positioners | Up to 6 | Up to 6 | Up to 6 |
| Magnification | 16X–100X | 16X–100X | 16X–100X |
| RF | To 67 GHz | To 67 GHz | To 67 GHz |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
