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H Series Integrated Manual Probe Station
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The H series is a manual station for a whole wafer, in 6, 8 and 12 inch. A pneumatic chuck and a large handwheel give fast travel and fine placement under 1 µm. The open modular platen takes DC, low-current, 1/f, failure-analysis, reliability, RF, and high-power, high-current or high-voltage kits.
Key Features
- Chuck travel published as 300 × 300 mm, resolution under 1.0 µm, flatness under 10 µm
- Coarse theta 360°, fine ±8.0°
- Z quick lift 3 mm, fine lift 0–13 mm at 2 µm or better
- Platen in three positions: 300 µm separation, 5 mm load, and 0–40 mm continuous
- Contact repeatability under ±1 µm
- Up to 8 DC and 4 RF micropositioners, magnetic or vacuum mount
Specifications
| Specification | H6 | H8 | H12 |
|---|---|---|---|
| Wafer | 6 inch | 8 inch | 12 inch |
| Control | Manual | Manual | Manual |
| Environment | Open | Open | Open |
| Power | 220 V, 50–60 Hz | 220 V, 50–60 Hz | 220 V, 50–60 Hz |
| Chuck XY travel | 300 × 300 mm | 300 × 300 mm | 300 × 300 mm |
| XY resolution | < 1.0 µm | < 1.0 µm | < 1.0 µm |
| Flatness | < 10 µm | < 10 µm | < 10 µm |
| Theta | 360° coarse, ±8.0° fine | 360° coarse, ±8.0° fine | 360° coarse, ±8.0° fine |
The product page gives one outline for the series, 1046 × 987 × 828 mm, and a weight of about 400 kg. Chuck travel is published as 300 × 300 mm (12 in × 12 in).
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
