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FA Series Failure Analysis Probe Station
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The FA series is a manual 8 inch station for a failure-analysis laboratory. FA8 is the open station. FA8-SC adds a −80 °C to 200 °C chuck and a quick-pull sample stage. An optional laser, at 1064, 532, 355 or 266 nm, cuts or clears metal and ITO features down to 1 × 1 µm with a 100X lens.
Key Features
- 8 inch chuck, 360° rotation, 1 µm movement
- U platen for 10 micropositioners, or an O platen for 12 on FA8-SC
- Microscope 20X to 4000X
- Laser micromachining of Cr, Al, ITO, Ni, TFT, poly and similar films
- Coaxial leakage 1 pA/V, triaxial 100 fA/V, at 25 °C
- High-voltage and high-current kit is an option
Specifications
| Specification | FA8 | FA8-SC |
|---|---|---|
| Wafer | 8 inch, 360° rotation | 8 inch, 360° rotation |
| Size (L × W × H) | 960 × 850 × 1500 mm | 880 × 860 × 1550 mm |
| Weight | About 260 kg | About 280 kg |
| Power | 220 V, 50–60 Hz | 220 V, 50–60 Hz |
| XY travel / resolution | 8 × 8 inch / 1 µm | 8 × 8 inch / 1 µm |
| Temperature | Room temperature | −80 °C to 200 °C |
| Quick stage pull-out | No | Yes |
| Platen | U shape, up to 10 positioners | O shape, up to 12 positioners |
| Microscope travel | XY 2 × 2 inch, Z 50.8 mm | XY 1 × 1 inch, Z 50.8 mm |
| Magnification | 20X to 4000X | 20X to 4000X |
| Laser wavelength | 1064 / 532 / 355 / 266 nm | 1064 / 532 / 355 / 266 nm |
| Laser output | 2.2 mJ/pulse, upgradeable | 2.2 mJ/pulse, upgradeable |
| Smallest laser cut | 1 × 1 µm with a 100X lens | 1 × 1 µm with a 100X lens |
| Leakage | 1 pA/V coaxial, 100 fA/V triaxial | 1 pA/V coaxial, 100 fA/V triaxial |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
