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E Series Enhanced Manual Probe Station
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The E series is a manual station for pads of 1 µm and up. A modular platen lets a lab add millimetre-wave, failure analysis, MEMS, reliability or optoelectronic test later. Chucks are 4, 6, 8 and 12 inch, held by ring vacuum, with an electrically floating backside electrode.
Key Features
- Movement accuracy 10 µm on the chuck, 1 µm on the microscope
- Theta 360° coarse, ±8° fine at 0.002°
- Metallurgical microscope, 20X to 2000X, standard
- Micropositioners 12 mm in X, Y and Z, at 10 µm, 2 µm or 0.7 µm
- Coaxial leakage 1 pA/V, triaxial 100 fA/V, at 25 °C
Specifications
| Specification | E4 | E6 | E8 | E12 |
|---|---|---|---|---|
| Chuck | 4 inch | 6 inch | 8 inch | 12 inch |
| Size (L × W × H) | 680 × 670 × 760 mm | 680 × 670 × 760 mm | 750 × 670 × 800 mm | 1030 × 800 × 850 mm |
| Weight | About 90 kg | About 95 kg | About 110 kg | About 210 kg |
| Power | 220 V, 50–60 Hz | 220 V, 50–60 Hz | 220 V, 50–60 Hz | 220 V, 50–60 Hz |
| Chuck XY travel | 100 × 100 mm | 150 × 150 mm | 200 × 200 mm | 250 × 250 mm |
| Chuck accuracy | 10 µm | 10 µm | 10 µm | 10 µm |
| Micropositioners | Up to 6 | Up to 6 | Up to 8 | Up to 10 |
| Magnification | 20X–2000X | 20X–2000X | 20X–2000X | 20X–2000X |
| Leakage | 1 pA/V coaxial, 100 fA/V triaxial | Same | Same | Same |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
