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CGX Vacuum High-Low Temperature Semi-Automatic Probe Station
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The CGX8 is a semi-automatic 8 inch probe station for measurements in vacuum at high and low temperature. With liquid nitrogen the range is 77 K to 450 K. With liquid helium it is 20 K to 450 K. It is aimed at development and at selected production test, including power devices, MEMS, RF and low-current work.
Key Features
- Semi-automatic, and it can still be probed by hand
- Automatic wafer alignment, mapping and die-size measurement
- Chuck stage speed and a temperature stability better than ±0.1 °C on the series description
- Four-axis chuck calibration for micrometre pads
Specifications
| Specification | CGX8 |
|---|---|
| Wafer chuck | 8 inch |
| Control | Semi-automatic |
| Size | 1150 × 1450 × 1800 mm |
| Weight | About 1000 kg |
| Power | 220 V AC, 50–60 Hz |
| Temperature, liquid nitrogen | 77 K to 450 K |
| Temperature, liquid helium | 20 K to 450 K |
| Chuck flatness | 20 µm |
| Probe arm travel, X / Y / Z | 10 mm / 10 mm / 10 mm |
| Probe arm positioning | 2 µm |
| Chuck stage travel, X / Y / Z | 200 mm / 200 mm / 20 mm |
| Chuck stage theta | ±5° |
| Stage repeatability | ±1 µm |
| Controller resolution | 0.001 °C |
| System ultimate pressure | < 5.0 × 10⁻⁴ Pa |
| Leak rate | 1.3 × 10⁻⁹ Pa·m³/s |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
