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A Series Full Automatic Probe Station
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The A series is a fully automatic wafer prober for WAT and CP test on advanced-process SoC, logic, memory and power wafers. Closed-loop motion, optical alignment and an in-house pre-aligner place the probes automatically. It is already in production at foundries and OSAT lines, including frame wafers, dual-port, motorised probe cards and four-wire test.
The A12S is set up for wafer-level WAT, with a hinge that docks to mainstream WAT testers. The A12W is set up for CP, including square wafers, high probe force, frame wafers and WLR, and it docks to mainstream ATE. Both run unattended, including thin, warped, blue-tape and Taiko wafers.
Key Features
- Probe placement ±2 µm with a ballscrew stage, or ±1.5 µm with a linear-motor stage
- Temperature −50 °C to 200 °C, or −60 °C to 300 °C as an option, stability 0.1 °C
- Leakage down to the fA level for RF, power and noise measurements
- 24-hour unattended handling, with PMI probe-mark inspection after each touchdown
- Recipe tools can reuse a probe-card file and convert TEL or TSK recipes
Specifications
| Specification | A8 | A12S | A12W |
|---|---|---|---|
| Wafer diameter | 8 in, 6 in | 12 in, 8 in | 12 in, 8 in |
| Wafer thickness | 100–300 µm (Bernoulli) or 300–2000 µm (ceramic vacuum) | 300–2000 µm (ceramic vacuum) | 75–200 µm (Bernoulli) or 200–2000 µm (ceramic vacuum) |
| Die size | 200–100,000 µm | 300–100,000 µm | 200–100,000 µm |
| Chuck XY travel | X 260 mm, Y 430 mm | X ±165 mm, Y −170 to +600 mm | X ±170 mm, Y −180 to +450 mm |
| XY repeatability | ±1 µm | ±0.5 µm | ±0.5 µm |
| XY accuracy | ±2 µm | ±1 µm | ±1 µm |
| XY resolution | 0.1 µm | 0.1 µm | 0.05 µm |
| XY maximum speed | 240 mm/s | 500 mm/s | 500 mm/s |
| Chuck Z travel | 80 mm | 40 mm | 70 mm |
| Z repeatability / accuracy | ±1 µm / ±2 µm | ±1 µm / ±2 µm | ±1 µm / ±2 µm |
| Z resolution / speed | 0.1 µm / 40 mm/s | 0.1 µm / 40 mm/s | 0.1 µm / 40 mm/s |
| Theta range / resolution | ±10° / 0.0001° | ±5° / 0.0004° | ±5° / 0.0004° |
| Index time, XY 1 mm, Z 0.5 mm | ≤280 ms | ≤185 ms | ≤185 ms |
| Index time, XY 10 mm, Z 0.5 mm | ≤370 ms | ≤250 ms | ≤250 ms |
| Size (L × W × H) | 1124 × 1158 × 955 mm | 1982 × 2013 × 1543 mm | 1575 × 1475 × 1385 mm |
| Weight | 1200 kg | 2000 kg | 1750 kg |
| Power | 220 V, 50/60 Hz, 16 A | 220 V, 50/60 Hz, 16 A | 220 V, 50/60 Hz, 16 A |
| Vacuum / CDA | < −75 kPa / 0.6–0.8 MPa | < −75 kPa / 0.6–0.8 MPa | < −75 kPa / 0.6–0.8 MPa |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
