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V Series High Performance Probe Station
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The V series keeps the X series operation in about half the floor space and weight. It runs semi-automatically, and a loader turns it into a fully automatic station for fast, high-accuracy batch test at room temperature or with a high/low temperature chuck.
Key Features
- Loader option for fully automatic cassette handling, single or dual arm
- Room-temperature, hot or cold chuck
- Shielded top cover, or a standard cover
- Virtual platen lifts clear of the wafer by hand
- Chuck X and Y can still be moved by hand
- RS-232, TCP/IP and GPIB
- Full-coverage guard for very low system leakage
Specifications
| Specification | V8 | V12 |
|---|---|---|
| Wafer | 8 inch | 12 inch |
| Control | Semi-automatic, or fully automatic with a loader | Semi-automatic, or fully automatic with a loader |
| Environment | Room temperature or high/low temperature | Room temperature or high/low temperature |
| Size (W × L × H) | 800 × 850 × 1900 mm | 1000 × 1250 × 1900 mm |
| Weight | 650 kg | 1000 kg |
| Power | 220 V | 220 V |
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
