Semishare

E Series Enhanced Manual Probe Station

  • E Series Enhanced Manual Probe Station
Model

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The E series is a manual station for pads of 1 µm and up. A modular platen lets a lab add millimetre-wave, failure analysis, MEMS, reliability or optoelectronic test later. Chucks are 4, 6, 8 and 12 inch, held by ring vacuum, with an electrically floating backside electrode.

Key Features

  • Movement accuracy 10 µm on the chuck, 1 µm on the microscope
  • Theta 360° coarse, ±8° fine at 0.002°
  • Metallurgical microscope, 20X to 2000X, standard
  • Micropositioners 12 mm in X, Y and Z, at 10 µm, 2 µm or 0.7 µm
  • Coaxial leakage 1 pA/V, triaxial 100 fA/V, at 25 °C

Specifications

Specification E4 E6 E8 E12
Chuck 4 inch 6 inch 8 inch 12 inch
Size (L × W × H) 680 × 670 × 760 mm 680 × 670 × 760 mm 750 × 670 × 800 mm 1030 × 800 × 850 mm
Weight About 90 kg About 95 kg About 110 kg About 210 kg
Power 220 V, 50–60 Hz 220 V, 50–60 Hz 220 V, 50–60 Hz 220 V, 50–60 Hz
Chuck XY travel 100 × 100 mm 150 × 150 mm 200 × 200 mm 250 × 250 mm
Chuck accuracy 10 µm 10 µm 10 µm 10 µm
Micropositioners Up to 6 Up to 6 Up to 8 Up to 10
Magnification 20X–2000X 20X–2000X 20X–2000X 20X–2000X
Leakage 1 pA/V coaxial, 100 fA/V triaxial Same Same Same

Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.

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