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C Series High-Low Temperature Probe Station
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The C series is a manual probe station for test at high and low temperature in a shielded, non-vacuum chamber. Dry gas or a slight over-pressure keeps the sample free of frost. It is used on ICs, LEDs, LCDs, solar cells and other devices, including IV/CV, RF and pads down to 0.2 µm.
Key Features
- Pneumatic chuck travel across a whole wafer, with three fast-move modes
- Three-position platen: contact, 300 µm separation, and load, with a lock
- 3ZOOM imaging, three magnifications in one view
- Shielded cavity for low noise and low leakage
- Published temperature range −60 °C to +300 °C
Specifications
| Specification | C6 | C8 | C12 |
|---|---|---|---|
| Wafer | 6 inch | 8 inch | 12 inch |
| Control | Manual | Manual | Manual |
| Weight | About 150 kg | About 170 kg | About 250 kg |
| Power | 220 V, 50–60 Hz | 220 V, 50–60 Hz | 220 V, 50–60 Hz |
| Chuck resolution | 1.0 µm | 1.0 µm | 1.0 µm |
| Chuck flatness | < 10 µm | < 10 µm | < 10 µm |
| Temperature | −60 °C to +300 °C | −60 °C to +300 °C | −60 °C to +300 °C |
| Light attenuation | ≥ 130 dB | ≥ 130 dB | ≥ 130 dB |
| EMI shielding | > 30 dB typical, 1 kHz to 1 MHz | Same | Same |
The product page publishes one outline, 1400 × 920 × 920 mm, and chuck travels of 205 × 205 mm and 305 × 305 mm. It does not assign those figures model by model.
Official product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.
