{"product_id":"x-series-semi-automatic-probe-station","title":"X Series Semi-Automatic Probe Station","description":"\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThe X series is a semi-automatic wafer probe station for 6, 8 and 12 inch Si, GaN and SiC devices. It covers DC I-V and C-V, optical, RF and 1\/f noise, and it can be fitted later for high-power wafer test, RF, a full-automatic loader and a temperature chuck.\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThe chuck moves at 70 mm\/s or faster, with motion accuracy of 1 µm or better and an index time of 500 ms or less. A shielded chamber keeps leakage low, and the station can be opened so the whole chuck pulls out 370 mm for loading.\u003c\/p\u003e\u003ch2\u003eKey Features\u003c\/h2\u003e\u003cul\u003e\n\u003cli\u003eSemi-automatic, and it can still be driven by hand\u003c\/li\u003e\n\u003cli\u003eAutomatic wafer alignment, mapping, die-size measurement and remote test data\u003c\/li\u003e\n\u003cli\u003eOne-button RF probe calibration and four-axis chuck calibration\u003c\/li\u003e\n\u003cli\u003eTemperature stability better than ±0.08 °C\u003c\/li\u003e\n\u003cli\u003eMicroscope with simultaneous 100X to 1000X views\u003c\/li\u003e\n\u003cli\u003eHigh-power, RF and fully automatic test are field upgrades, not separate models\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch2\u003eSpecifications\u003c\/h2\u003e\u003cdiv style=\"overflow-x:auto;-webkit-overflow-scrolling:touch;\"\u003e\u003ctable style=\"border-collapse:collapse;width:100%;min-width:480px;font-size:13px;margin:8px 0 18px;\"\u003e\n\u003cthead\u003e\u003ctr\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eSpecification\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eX6\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eX8\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eX12\u003c\/th\u003e\n\u003c\/tr\u003e\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eWafer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e6 inch\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e8 inch\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e12 inch\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eControl\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eSemi-automatic\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eSemi-automatic\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eSemi-automatic\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eChuck speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≥70 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≥70 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≥70 mm\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eMotion accuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤1 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eIndex time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤500 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤500 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤500 ms\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eTemperature stability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eBetter than ±0.08 °C\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eBetter than ±0.08 °C\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eBetter than ±0.08 °C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eOptics\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e100X–1000X\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e100X–1000X\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e100X–1000X\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003ePower\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50–60 Hz\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50–60 Hz\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50–60 Hz\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\u003c\/div\u003e\u003cp\u003eThe current product page publishes one outline for the series, 1060 × 1610 × 1550 mm, and a weight of about 1500 kg. It does not publish a separate size for each wafer.\u003c\/p\u003e\u003cp\u003eOfficial product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.\u003c\/p\u003e","brand":"Semishare","offers":[{"title":"X6","offer_id":54042432799014,"sku":"X6","price":0.0,"currency_code":"HKD","in_stock":true},{"title":"X8","offer_id":54042432831782,"sku":"X8","price":0.0,"currency_code":"HKD","in_stock":true},{"title":"X12","offer_id":54042432864550,"sku":"X12","price":0.0,"currency_code":"HKD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0953\/9797\/0214\/files\/semishare-x-1.jpg?v=1791448542","url":"https:\/\/nplab.shop\/products\/x-series-semi-automatic-probe-station","provider":"NP LAB","version":"1.0","type":"link"}