{"product_id":"a-series-full-automatic-probe-station","title":"A Series Full Automatic Probe Station","description":"\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThe A series is a fully automatic wafer prober for WAT and CP test on advanced-process SoC, logic, memory and power wafers. Closed-loop motion, optical alignment and an in-house pre-aligner place the probes automatically. It is already in production at foundries and OSAT lines, including frame wafers, dual-port, motorised probe cards and four-wire test.\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThe A12S is set up for wafer-level WAT, with a hinge that docks to mainstream WAT testers. The A12W is set up for CP, including square wafers, high probe force, frame wafers and WLR, and it docks to mainstream ATE. Both run unattended, including thin, warped, blue-tape and Taiko wafers.\u003c\/p\u003e\u003ch2\u003eKey Features\u003c\/h2\u003e\u003cul\u003e\n\u003cli\u003eProbe placement ±2 µm with a ballscrew stage, or ±1.5 µm with a linear-motor stage\u003c\/li\u003e\n\u003cli\u003eTemperature −50 °C to 200 °C, or −60 °C to 300 °C as an option, stability 0.1 °C\u003c\/li\u003e\n\u003cli\u003eLeakage down to the fA level for RF, power and noise measurements\u003c\/li\u003e\n\u003cli\u003e24-hour unattended handling, with PMI probe-mark inspection after each touchdown\u003c\/li\u003e\n\u003cli\u003eRecipe tools can reuse a probe-card file and convert TEL or TSK recipes\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch2\u003eSpecifications\u003c\/h2\u003e\u003cdiv style=\"overflow-x:auto;-webkit-overflow-scrolling:touch;\"\u003e\u003ctable style=\"border-collapse:collapse;width:100%;min-width:480px;font-size:13px;margin:8px 0 18px;\"\u003e\n\u003cthead\u003e\u003ctr\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eSpecification\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eA8\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eA12S\u003c\/th\u003e\n\u003cth style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;background:#f3f5f8;font-weight:600;text-align:left;white-space:nowrap;\"\u003eA12W\u003c\/th\u003e\n\u003c\/tr\u003e\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eWafer diameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e8 in, 6 in\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e12 in, 8 in\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e12 in, 8 in\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eWafer thickness\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e100–300 µm (Bernoulli) or 300–2000 µm (ceramic vacuum)\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e300–2000 µm (ceramic vacuum)\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e75–200 µm (Bernoulli) or 200–2000 µm (ceramic vacuum)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eDie size\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e200–100,000 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e300–100,000 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e200–100,000 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eChuck XY travel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eX 260 mm, Y 430 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eX ±165 mm, Y −170 to +600 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003eX ±170 mm, Y −180 to +450 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eXY repeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±0.5 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±0.5 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eXY accuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±2 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eXY resolution\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.1 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.05 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eXY maximum speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e240 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e500 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e500 mm\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eChuck Z travel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e80 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e40 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e70 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eZ repeatability \/ accuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm \/ ±2 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm \/ ±2 µm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±1 µm \/ ±2 µm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eZ resolution \/ speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.1 µm \/ 40 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.1 µm \/ 40 mm\/s\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e0.1 µm \/ 40 mm\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eTheta range \/ resolution\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±10° \/ 0.0001°\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±5° \/ 0.0004°\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e±5° \/ 0.0004°\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eIndex time, XY 1 mm, Z 0.5 mm\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤280 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤185 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤185 ms\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eIndex time, XY 10 mm, Z 0.5 mm\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤370 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤250 ms\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e≤250 ms\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eSize (L × W × H)\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e1124 × 1158 × 955 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e1982 × 2013 × 1543 mm\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e1575 × 1475 × 1385 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e1200 kg\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e2000 kg\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e1750 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003ePower\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50\/60 Hz, 16 A\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50\/60 Hz, 16 A\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e220 V, 50\/60 Hz, 16 A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;white-space:nowrap;\"\u003e\u003cstrong\u003eVacuum \/ CDA\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e\u0026lt; −75 kPa \/ 0.6–0.8 MPa\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e\u0026lt; −75 kPa \/ 0.6–0.8 MPa\u003c\/td\u003e\n\u003ctd style=\"border:1px solid #d9dde3;padding:6px 10px;vertical-align:top;white-space:normal;word-break:normal;overflow-wrap:normal;\"\u003e\u0026lt; −75 kPa \/ 0.6–0.8 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\u003c\/div\u003e\u003cp\u003eOfficial product pages do not publish a downloadable datasheet. Contact us for the configuration and a quotation.\u003c\/p\u003e","brand":"Semishare","offers":[{"title":"A8","offer_id":54042431586598,"sku":"A8","price":0.0,"currency_code":"HKD","in_stock":true},{"title":"A12S","offer_id":54042431717670,"sku":"A12S","price":0.0,"currency_code":"HKD","in_stock":true},{"title":"A12W","offer_id":54042431750438,"sku":"A12W","price":0.0,"currency_code":"HKD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0953\/9797\/0214\/files\/semishare-a-1.jpg?v=1791448514","url":"https:\/\/nplab.shop\/products\/a-series-full-automatic-probe-station","provider":"NP LAB","version":"1.0","type":"link"}